RBS Applications
Elastic Recoil Detection Analysis (ERDA)
Although powerful, RBS is not suited for the detection of light elements such as H. However, a complementary ion scattering method, Elastic Recoil Detection Analysis (ERDA), can be used in conjunction with RBS for a more complete elemental analysis.
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This example compares the results of two separate experiments RBS and ERDA, performed on a (SiN+H)/Si stack.
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In RBS, the scattered α particles informs on the elemental composition and film thickness for Si and N. In ERDA, emitted protons are selectively detected and inform on the H composition.
Nuclear Reaction Analysis (NRA)
Nuclear Reaction Analysis is a powerful method relying on particular resonances of nuclear reactions between the incoming particle and the target atom.
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In this example, used for Li detection in a lithiated battery material, proton incident at 0.7 MeV generate α particles that are detected. In this case, other light elements such as F can be detected too.